概括了微机电系统的发展状况，分析了各种键合技术方法的优缺点及阳极键合技术今后的发展方向。探讨了微晶玻璃作为良好的封装材料或......

In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-a......

The fast pace of today’s world has presented several challenges in the area of healthcare. Depression, hypertension, di......

The mechanical response of shock-loaded microelectromechanical systems (MEMS) is simulated to formulate guidelines for t......

A release method of microobjects is presented based on the piezoelectric vibration. To achieve an effective release， the ......

微机电系统(MEMS)测试的主要目的是为工程开发中的设计和模拟过程提供数据反馈,其中一个重要方面就是MEMS器件动态特性的高速可视......